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COURSE OUTLINE
Central Arizona College 8470 N. Overfield Road Coolidge, AZ 85228 Phone: (520) 494-5206 Fax: (520) 494-
Prefix/Number: ELC 200
Course Title: Radio Frequency RF/High Vacuum HV
Course Description :
Prepares students entering the work force in many industries that use high vacuum and plasma systems in the processing of their products. Used in the manufacture of semiconductor devices, processing foods, surface hardening, compact disk production and film deposition.
Semester Hours : 3 Times for Credit: 1
Lecture/Lab Ratio : 2 lectures, 3 labs
Pre-requisites: Consent of the instructor (Sophomore Standing)
Co-requisites: None
Cross Listed: None
Grading Options: A/F
Approved Modalities: F2F
Central Arizona College ELC200 - Radio Frequency RF/High Vacuum HV Page 2 of 2
Learning Outcome Statements:
Upon completion of this course the student will be able to:
- Demonstrate a knowledge of safety procedures necessary when working with high vacuum and plasma systems.
- Explain the operation and pressure range of various types of vacuum pumps.
- Explain the function and use of various materials and hardware such as gauges, flanges and multi-port connectors.
- Demonstrate at least two leak detection procedures in a high vacuum system.
- Demonstrate a knowledge of safety procedures necessary when working with high power RF transmission and plasma systems.
- Explain the theory of operation and use of transmission lines and impedance matching networks.
- Discuss the troubleshooting procedure for RF sources and matching networks.
Standards:
The student will meet the learning outcomes at the following level, degree or measurement:
- Identify major safety precautions that must be observed when working with high vacuum and plasma systems with 80% accuracy.
- Each student will be able to explain the function and pressure range of at least five different types of vacuum pumps with 80% accuracy.
- Each student will be able to explain the function and pressure range of at least five different types of vacuum gauges and the hardware necessary to connect these gauges to a high vacuum system with 80% accuracy.
- Each student will be able to explain and demonstrate at least two leak detection procedures in a high vacuum system with 80% accuracy.
- Each student will be able to identify and discuss the major safety precautions that must be observed when working with high power RF sources, transmission lines and matching networks attached to high vacuum plasma systems with 80% accuracy.
- Each student will be able to explain the theory of operation of pi and L matching networks and how these networks facilitate the coupling of RF from the generator to the plasma load in the vacuum chamber with 80% accuracy.
- Each student will be able to discuss and demonstrate the use of a standing wave ratio (SWR) meter and dummy load to check RF power sources and matching networks with 80% accuracy.
AGEC/Special Requirements: None
Revised: 01/
